SOLICITATION NOTICE
16 -- Scanning Electron Microscope (SEM)
- Notice Date
- 5/22/2020 2:42:50 PM
- Notice Type
- Solicitation
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- BERKELEY NATL LAB - DOE CONTRACTOR Berkeley CA 94720 USA
- ZIP Code
- 94720
- Solicitation Number
- MG041720
- Response Due
- 5/27/2020 2:00:00 PM
- Archive Date
- 06/11/2020
- Point of Contact
- Martha Gamarano Grausz, Phone: 510-486-6618, Fax: 510-486-4380
- E-Mail Address
-
mggrausz@lbl.gov
(mggrausz@lbl.gov)
- Small Business Set-Aside
- SBA Total Small Business Set-Aside (FAR 19.5)
- Description
- The University of California, Lawrence Berkeley National Laboratory (""University"" or ""LBNL"") requests a proposal for Scanning Electron Microscope. The SEM must include the following Specifications:� must support 1-nm or better resolution at accelerating voltage of 500V or less. should support high resolution imaging with minimal damage of photo-polymer resist at a range of thickness going down to at least 20 nm. Target resolution at least 1 nm. In practice this may require the ability to operate at accelerating voltages as low as 50V. must support the loading of full 200-mm wafers with load-lock sample transfer. Accessible imaging area must be at least 100-mm centered on the 200-mm wafer. The SEM should also support future upgrade to loading 300-mm wafers, accessible imaging area can be reduced to 75-mm centered in this case if needed. must support data collection automation, i.e. the ability to define a set of locations that should be imaged in an automated routine The mechanical footprint of the machine must be no greater than 830mm x 1150mm, exclusive of the sample load port. The required service access must be no greater than 1000mm at the left, right (load port side), and rear faces; and no greater than 800mm at the front face. Operator�desk must be no greater than 1.5m wide by 1m deep, all pumps and chiller must be able to be located outside of the enclosure we will provide for the instrument. The proposed item should utilize environmentally preferable products and/or services to the maximum practicable extent. The offeror should have successfully performed within the last three years contracts similar in type and complexity as the proposed subcontract. The offeror should describe quality assurance programs and include applicable certifications.
- Web Link
-
SAM.gov Permalink
(https://beta.sam.gov/opp/8ba075f61b4f4a9bb9a62276420676d9/view)
- Place of Performance
- Address: Berkeley, CA 94720, USA
- Zip Code: 94720
- Country: USA
- Zip Code: 94720
- Record
- SN05669167-F 20200524/200522230158 (samdaily.us)
- Source
-
SAM.gov Link to This Notice
(may not be valid after Archive Date)
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